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Document Type and Number:
Japanese Patent JPS5179569
Kind Code:
A
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Inventors:
NAKAZAWA AKIRA
ABE MICHIRO
Application Number:
JP11775A
Publication Date:
July 10, 1976
Filing Date:
January 06, 1975
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L23/48; (IPC1-7): H01L23/48
Domestic Patent References:
JP44024381A



 
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