Document Type and Number:
Japanese Patent JPS52140770
Kind Code:
U
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Application Number:
JP5081276U
Publication Date:
October 25, 1977
Filing Date:
April 20, 1976
Export Citation:
International Classes:
H01L23/32; H01L23/02; H01L23/12; H01L23/28; (IPC1-7): H01L23/12; H01L23/02