Document Type and Number:
Japanese Patent JPS5328474
Kind Code:
Y1
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JP2000030652 | OBSERVATION OF SAMPLE AND DEVICE THEREOF |
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Application Number:
JP21176U
Publication Date:
July 18, 1978
Filing Date:
November 09, 1970
Export Citation:
International Classes:
G01N23/225; H01J37/252; (IPC1-7): G01N23/225; H01J39/34