Document Type and Number:
Japanese Patent JPS5515317
Kind Code:
Y2
Application Number:
JP10853975U
Publication Date:
April 09, 1980
Filing Date:
August 07, 1975
Export Citation:
International Classes:
H01L25/11; H01L21/52; H01L21/58; H01L23/14; H01L23/40; H01L29/861; (IPC1-7): H01L21/58