Document Type and Number:
Japanese Patent JPS55179066
Kind Code:
U
Application Number:
JP7811479U
Publication Date:
December 23, 1980
Filing Date:
June 08, 1979
Export Citation:
International Classes:
H01L29/812; H01L21/338; H01L21/52; H01L21/58; H01L29/41; H01L29/80; (IPC1-7): H01L29/44; H01L21/58; H01L29/80