Document Type and Number:
Japanese Patent JPS55179067
Kind Code:
U
Application Number:
JP7862979U
Publication Date:
December 23, 1980
Filing Date:
June 08, 1979
Export Citation:
International Classes:
H01L21/8222; H01L21/331; H01L27/082; H01L27/10; H01L29/08; H01L29/417; H01L29/72; H01L29/73; (IPC1-7): H01L29/72; H01L27/10; H01L29/08; H01L29/52
Domestic Patent References:
| JPS5080777A | 1975-07-01 |