Document Type and Number:
Japanese Patent JPS5793874
Kind Code:
U
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Application Number:
JP17164480U
Publication Date:
June 09, 1982
Filing Date:
November 29, 1980
Export Citation:
International Classes:
G01R29/12; G01L11/00; G01L21/00; G01R15/24; G01R29/14; (IPC1-7): G01R29/14; G01L21/00