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Title:
PHOTOCONDUCTIVE MEMBER
Document Type and Number:
Japanese Patent JPS58139150
Kind Code:
A
Abstract:

PURPOSE: To obtain a laminate type photoconductive amorphous silicon member undergoing no deterioration even after repeated use, having superior durability and moisture resistance, and leaving no measurable residual potential, by forming the 2nd specified amorphous layer on the 1st photoconductive amorphous layer.

CONSTITUTION: A photoconductive member 100 is manufactured by laminating an auxiliary layer 102 made of an Si atom-base amorphous material contg. halogen atoms and ≤30atomic% N atoms as constituent atoms and a charge implantation preventing layer 103 made of an Si atom-base amorphous material contg. atoms of a III group element as constituent atoms on a support 101 in order and by forming the 1st photoconductive amorphous layer 104 made of an Si atom-base amorphous material contg. H atoms and/or halogen atoms as constituent atoms and the 2nd amorphous layer 105 made of an amorphous material contg. Si atoms, C atoms and H atoms as constituent atoms on the layer 103 in order.


Inventors:
OGAWA KIYOUSUKE
SHIRAI SHIGERU
KANBE JIYUNICHIROU
SAITOU KEISHI
OOSATO YOUICHI
MISUMI TERUO
Application Number:
JP2171782A
Publication Date:
August 18, 1983
Filing Date:
February 13, 1982
Export Citation:
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Assignee:
CANON KK
International Classes:
G03G5/08; G03G5/082; H01L21/205; H01L31/0248; (IPC1-7): G03G5/08; H01L21/205; H01L31/08
Attorney, Agent or Firm:
Marushima Giichi



 
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