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Title:
【考案の名称】ボンデイング装置
Document Type and Number:
Japanese Patent JPS5824440
Kind Code:
Y2
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Inventors:
Toyoichi Ichii
Application Number:
JP16493478U
Publication Date:
May 25, 1983
Filing Date:
November 29, 1978
Export Citation:
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Assignee:
NEC Home Electronics Co., Ltd.
International Classes:
H01L21/60; (IPC1-7): H01L21/60
Attorney, Agent or Firm:
Hideo Ehara



 
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