Document Type and Number:
Japanese Patent JPS6151735
Kind Code:
U
Application Number:
JP13571684U
Publication Date:
April 07, 1986
Filing Date:
September 07, 1984
Export Citation:
International Classes:
H01L21/52; H01L21/58; (IPC1-7): H01L21/58
Domestic Patent References:
| JPS57115836A | 1982-07-19 | |||
| JPS41199Y1 |
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