Document Type and Number:
Japanese Patent JPS63102994
Kind Code:
U
More Like This:
JP5673497 | Integrated turbo molecular pump |
WO/2002/055883 | TURBO-MOLECULAR PUMP |
JPS63223393 | CENTRIFUGAL VACUUM PUMP |
Application Number:
JP20297486U
Publication Date:
July 04, 1988
Filing Date:
December 23, 1986
Export Citation:
International Classes:
F04D19/04; (IPC1-7): F04D19/04