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Document Type and Number:
Japanese Patent JPS63145164
Kind Code:
U
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Application Number:
JP3588487U
Publication Date:
September 26, 1988
Filing Date:
March 13, 1987
Export Citation:
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International Classes:
G01N27/30; G01N27/28; G01N27/416; H01L29/78; H01L29/786; (IPC1-7): G01N27/46; G01N27/30; H01L29/78



 
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