- Patent JPS63183274

Document Type and Number:

Japanese Patent JPS63183274

Kind Code:

U

More Like This:

JP2548378

Application Number:

JP7077687U

Publication Date:

November 25, 1988

Filing Date:

May 12, 1987

Export Citation:

International Classes:

F16J15/24; C30B15/30; H01L21/02; H01L21/208; (IPC1-7): C30B15/30; F16J15/24; H01L21/02; H01L21/208

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