Document Type and Number:
Japanese Patent JPS63183275
Kind Code:
U
Application Number:
JP7475287U
Publication Date:
November 25, 1988
Filing Date:
May 19, 1987
Export Citation:
International Classes:
H01L21/208; C30B19/00; (IPC1-7): C30B19/00; H01L21/208
Domestic Patent References:
| JPS6051695A | 1985-03-23 | |||
| JPS6131385A | 1986-02-13 |