Document Type and Number:
Japanese Patent JPS6348014
Kind Code:
B2
Abstract:
The operating range of an ionization tube vacuum gauge is increased by applying at least two different bias voltages to the tube and measuring ion current for the two bias voltages. The ratio of the ion currents indicates vacuum pressure in the range of 10-1 to above 2 Torr. An ionization tube vacuum gauge provides a pressure read-out by the linear ion current response of an ionization tube between 10-10 Torr and 10-2 Torr. The non-linearity of the ion current response between 10-2 Torr and 10-1 Torr is compensated by a non-linear amplifier. Above 10-1 Torr the ratio of ion currents is utilized for determining pressure.
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Inventors:
RONARUDO EMU PEETEITSUCHI
DONARUDO DEI BURIGURIA
DONARUDO DEI BURIGURIA
Application Number:
JP16316080A
Publication Date:
September 27, 1988
Filing Date:
November 19, 1980
Export Citation:
Assignee:
RONARUDO EMU PEETEITSUCHI
DONARUDO DEI BURIGURIA
DONARUDO DEI BURIGURIA
International Classes:
G01L21/30; G01L21/32
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