Document Type and Number:
Japanese Patent JPS6373936
Kind Code:
U
Application Number:
JP16819186U
Publication Date:
May 17, 1988
Filing Date:
November 04, 1986
Export Citation:
International Classes:
B61D27/00; B61B3/02; B61J1/00; B65G49/00; F24F7/06; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B61D27/00; B65G49/00; F24F7/06
Domestic Patent References:
| JPS58116300U | 1983-08-08 | |||
| JPS5587650A | 1980-07-02 |