Document Type and Number:
Japanese Patent JPS6450383
Kind Code:
U
Application Number:
JP14608387U
Publication Date:
March 28, 1989
Filing Date:
September 24, 1987
Export Citation:
International Classes:
G01R19/165; G01R31/26; G08B5/36; G09F9/30; H01L21/66; H01L33/00; (IPC1-7): G01R31/26; G01R19/165; G08B5/36; G09F9/30; H01L21/66; H01L33/00