４元組成比傾斜膜の作成方法及びこの方法を用いた２元組成比・膜厚傾斜膜の作成方法並びに多元組成物質の組成比のサンプリング方法 - Independent administrative institution Japan Science and Technology Agency

Title:

４元組成比傾斜膜の作成方法及びこの方法を用いた２元組成比・膜厚傾斜膜の作成方法並びに多元組成物質の組成比のサンプリング方法

Document Type and Number:

Japanese Patent JPWO2004083481

Kind Code:

A

Inventors:

Kenji Idaka
Yamamoto Yukio
Yuji Matsumoto
Hideomi Koinuma

Application Number:

JP2004003304W

Publication Date:

September 30, 2004

Filing Date:

March 12, 2004

Export Citation:

Assignee:

Independent administrative institution Japan Science and Technology Agency

International Classes:

C23C14/54

Attorney, Agent or Firm:

Kazuyuki Hirayama

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