Title:
薄膜形成方法
Document Type and Number:
Japanese Patent JPWO2007145292
Kind Code:
A
Inventors:
Furuyasu village 隆
Wood Kazuyuki
Toshihiro Kugimiya
Aomine Nobutaka
Yuki Aoshima
Wood Kazuyuki
Toshihiro Kugimiya
Aomine Nobutaka
Yuki Aoshima
Application Number:
JP2007062038W
Publication Date:
December 21, 2007
Filing Date:
June 14, 2007
Export Citation:
Assignee:
Asahi Glass Co., Ltd.
Kobe Steel, Ltd.
Kobe Steel, Ltd.
International Classes:
C03C17/245; C23C16/505; C23C16/54; C23C16/40
Attorney, Agent or Firm:
Haruko Miwa
Toshiharu Ogawa
Yamamoto Ryozo
Spring name Kenji
Mochitoshi Watanabe
Toshiharu Ogawa
Yamamoto Ryozo
Spring name Kenji
Mochitoshi Watanabe
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