Title:
TEST DEVICE AND TEST METHOD
Document Type and Number:
WIPO Patent Application WO/2010/029772
Kind Code:
A1
Abstract:
Provided is a test device for testing a device under test. The test device is provided with: a power supply unit for supplying power to a power supply terminal of a device under test, a power supply control unit in which the power supply unit is controlled to output power at a plurality of voltage levels, a current measurement unit in which the current value at each voltage level is measured as the stationary current of the device under test supplied from the power supply unit to the power supply terminal, and an analysis unit in which at least three of the current values of each voltage level measured by the current measurement unit are used to analyze the presence or absence of faults in the device under test.
Inventors:
FURUKAWA YASUO (JP)
Application Number:
PCT/JP2009/004547
Publication Date:
March 18, 2010
Filing Date:
September 11, 2009
Export Citation:
Assignee:
ADVANTEST CORP (JP)
FURUKAWA YASUO (JP)
FURUKAWA YASUO (JP)
International Classes:
G01R31/26; H01L21/66
Domestic Patent References:
| WO2006041064A1 | 2006-04-20 |
Foreign References:
| JPH10332775A | 1998-12-18 | |||
| JP2000171529A | 2000-06-23 | |||
| JP2004219115A | 2004-08-05 |
Attorney, Agent or Firm:
RYUKA IP LAW FIRM (JP)
Ryuka international patent business corporation (JP)
Ryuka international patent business corporation (JP)
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