Title:
ABRASIVE CLOTH DRESSER AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP3527448
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a chemical and mechanical plane abrasive cloth dresser, eliminating the possibility of affecting a binder holding diamond abrasive grains with chemical slurry having high acidity and of contamination by the chemical slurry and falling of the diamond abrasive grains due to elusion of metals.
SOLUTION: A binder 4 consisting of silicon and/or silicon alloy and diamond abrasive grains 3 are mixed together, molded and sintered to obtain a sintered body 2 constituting a dressing plane 2a. The surface of the sintered body with the diamond abrasive grains 3 is provided with a carbide film 5 produced by sintering of silicon in the binder 4 reacting with diamond. Therefore, the diamond abrasive grains and the binder in the sintered body are firmly bonded, eliminating the possibility of affecting the binder with a chemical slurry and of contamination by the chemical slurry and falling of the diamond abrasive grains.
Inventors:
Kimura, Kenichi
Kanari, Moriyasu
Kanari, Moriyasu
Application Number:
JP36175399A
Publication Date:
May 17, 2004
Filing Date:
December 20, 1999
Export Citation:
Assignee:
READ CO LTD
International Classes:
B24B53/12; B24B53/007; B24D3/00; B24D3/02; B24D3/06; B24D3/28; B24D18/00; H01L21/304; (IPC1-7): B24D3/02; B24B53/12; B24D3/00; B24D3/06
Attorney, Agent or Firm:
林 宏 （外２名）
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