To suppress the influence on detection error of parasitic capacity of wires by making the length of wires for taking out signals short and substantially equal.
At one side of a support substrate 1, end parts of fixed electrode pads 26a and 26b formed on the surface side of a fixed electrode part 24d and a movable electrode pad 26c formed on the surface side of a support part 231 are juxtaposed on one line along the vertical direction in Fig.(a). Therefore, since the length of wires with a signal processing circuit can be shortened, and three wires can be set substantially to the same length, compared with a conventional example where four pads 261-264 are juxtaposed by twos on two sides of the support substrate 1, the parasitic capacity can be canceled among the wires while reducing the parasitic capacity of wires, and the influence on detection error of the parasitic capacity of wires can be suppressed.
TANIGUCHI NAOHIRO
MATSUZAKI JUNJI
SAKAI KOJI
Atsuo Mori
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