Title:
ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JP2010210424
Kind Code:
A
Abstract:
To improve shock resistance without lowering detection sensitivity.
Beam parts 6, 7 are formed in a grid shape respectively having a plurality of strut parts 60, 70, and a plurality of bridge parts 61, 71 bridged over the plurality of strut parts 60, 70. Hereby, a tensile rigidity or a bending rigidity can be heightened furthermore than a conventional beam part formed prismatically, while maintaining a torsional rigidity of the beam parts 6, 7. Resultantly, shock resistance can be improved without lowering detection sensitivity.
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Inventors:
UEDA HIDEKI
IBARA NOBUYUKI
YOSHIDA HITOSHI
MORI TAKASHI
OKADA MASAFUMI
IBARA NOBUYUKI
YOSHIDA HITOSHI
MORI TAKASHI
OKADA MASAFUMI
Application Number:
JP2009056949A
Publication Date:
September 24, 2010
Filing Date:
March 10, 2009
Export Citation:
Assignee:
PANASONIC ELEC WORKS CO LTD
International Classes:
G01P15/125; G01P15/18; H01L29/84
Domestic Patent References:
| JP2007298383A | 2007-11-15 | |||
| JPH05172843A | 1993-07-13 | |||
| JP2008544243A | 2008-12-04 | |||
| JP2005527384A | 2005-09-15 | |||
| JP2005283402A | 2005-10-13 |
Attorney, Agent or Firm:
Keisei Nishikawa