酸発生剤、スルホン酸、スルホン酸誘導体、含ハロゲンビシクロオクタン系化合物および感放射線性樹脂組成物

Title:

酸発生剤、スルホン酸、スルホン酸誘導体、含ハロゲンビシクロオクタン系化合物および感放射線性樹脂組成物

Document Type and Number:

Japanese Patent JP4320579

Kind Code:

B2

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Inventors:

Rui Ebata
Eiji Yoneda
Wang Yong

Application Number:

JP2003344623A

Publication Date:

August 26, 2009

Filing Date:

October 02, 2003

Export Citation:

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Assignee:

JSR CORPORATION

International Classes:

C07C309/19; G03F7/004; C07C22/00; C07C22/02; C07C25/02; C07C25/22; C07C43/225; C07C69/732; C07C69/76; C07C309/80; C07C381/12; G03F7/038; G03F7/039; H01L21/027

Domestic Patent References:

JP2000034272A
JP2000517067A

Foreign References:

WO1999001429A1

Other References:

Journal of Organic Chemistry,1994年,59(4),p.854-857
Journal of the Chemical Society, Perkin Transactions 1: Organic and Bio-Organic Chemistry,1993年,(3),p.331-334

Attorney, Agent or Firm:

Ippei Watanabe
Koji Kikawa
Takeshi Higuchi

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