Title:
補強構造を有する音響共振器及びその製造方法
Document Type and Number:
Japanese Patent JP7399434
Kind Code:
B2
Abstract:
An acoustic resonator with a reinforcing structure is provided according to the present disclosure. The acoustic resonator includes a substrate and a cavity formed on the substrate, a piezoelectric layer is arranged above the substrate and an opening passing through the piezoelectric layer is formed in a peripheral region of the piezoelectric layer. The reinforcing structure includes a reinforcing layer, part of the reinforcing layer is formed at the edge of the opening with being fitted to the edge, to reinforce a resonant functional layer near the edge of the opening, which can reduce a change in stress of the piezoelectric layer and the lower electrode near the edge of the opening after the cavity is released, so that the piezoelectric layer and the lower electrode do not easily collapse due to stress, thereby ensuring the performance of a device. A method for manufacturing the same is further provided.
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Inventors:
Lin Ping Lee
盛 ▲荊▼浩
River boat
盛 ▲荊▼浩
River boat
Application Number:
JP2022210465A
Publication Date:
December 18, 2023
Filing Date:
December 27, 2022
Export Citation:
Assignee:
杭州星▲闔▼科技有限公司
International Classes:
H03H9/17; B81B3/00; B81C1/00; H03H3/02
Domestic Patent References:
| JP2010154233A |
Foreign References:
| WO2013125371A1 | ||||
| WO2021246443A1 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mihiro
Tatsuhiko Abe
Shinya Mihiro
Tatsuhiko Abe