Title:
ACTIVE BRAKE, SAMPLE STAGE WITH ACTIVE BRAKE, AND CHARGE PARTICLE DEVICE
Document Type and Number:
Japanese Patent JP2015191751
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an active brake capable of suppressing minute vibration of a top table for mounting a sample, and enhancing the image quality of an observation image or the accuracy of dimensional measurement values in the case of a charged particle beam device, for example, and to provide a sample stage, and a charged particle beam device.SOLUTION: An active brake including a brake pad (1104), and a displacement expansion mechanism (1110) having a press member (1105) for pressing the brake pad against a brake rail and an elastic hinge (1103), further includes a flexible leaf spring (1102), and a curved surface or a slope for allowing inclination of the brake pad is provided in at least one of the pressed part (1114) of the brake pad, and the contact portion of the press member with the pressed part.
Inventors:
TAKAHASHI MUNEHIRO
MIZUOCHI MAKI
NAKAGAWA SHUICHI
MAEDA SHUSAKU
MATSUSHIMA MASARU
SHIBATA NOBUO
OGAWA HIRONORI
MIZUOCHI MAKI
NAKAGAWA SHUICHI
MAEDA SHUSAKU
MATSUSHIMA MASARU
SHIBATA NOBUO
OGAWA HIRONORI
Application Number:
JP2014067398A
Publication Date:
November 02, 2015
Filing Date:
March 28, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/20; F16D55/00; F16D63/00; F16D65/095; F16D65/18
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki