Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
Japanese Patent JP2015191752
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a charged particle beam device which allows for highly accurate measurement and inspection, while reducing the load on a stage.SOLUTION: A charged particle beam device including an object lens (2) for focusing a charged particle beam emitted from a charged particle beam source, and a table for mounting a sample to be irradiated with the charged particle beam, is further provided with a guide (11) for guiding the table in one direction, and a plurality of planar magnetic materials (12) arranged between the guide and the object lens. The guide is composed of a magnetic material, and arranged to be located in a gap between the plurality of planar magnetic materials, when viewing from the irradiation direction of the charged particle beam.
Inventors:
HASEGAWA MANABU
SHIMIZU TOSHIHIKO
RI AKIRA
SHIMIZU TOSHIHIKO
RI AKIRA
Application Number:
JP2014067399A
Publication Date:
November 02, 2015
Filing Date:
March 28, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/147; H01J37/09
Domestic Patent References:
| JPH01125932A | 1989-05-18 | |||
| JPH01125932A | 1989-05-18 | |||
| JPS55165628A | 1980-12-24 | |||
| JPS55165628A | 1980-12-24 |
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki