Title:
ACTUATOR AND SENSOR
Document Type and Number:
Japanese Patent JP2004174663
Kind Code:
A
Abstract:
To provide actuator and sensor prepared by using a spray coating method.
In this actuator, a functional film structure deposited/formed by using the spray coating method for applying liquid droplets of an atomized functional material together with compressed spray gas is provided on the surface of a substrate having ruggedness of a stepped shape or a deep groove, etc. In this sensor, a functional film structure deposited/formed by using the spray coating method for applying liquid droplets of the atomized functional material together with compressed spray gas is provided on an outside surface or an inside surface of a cylindrical tube.
Inventors:
ICHIKI MASAAKI
LULU ZHANG
IKEHARA TAKESHI
MAEDA RYUTARO
LULU ZHANG
IKEHARA TAKESHI
MAEDA RYUTARO
Application Number:
JP2002343862A
Publication Date:
June 24, 2004
Filing Date:
November 27, 2002
Export Citation:
Assignee:
NAT INST OF ADV IND & TECHNOL
International Classes:
B81B1/00; B05D1/02; B81C99/00; (IPC1-7): B81B1/00; B05D1/02; B81C5/00
Domestic Patent References:
| JPH1126832A | 1999-01-29 | |||
| JP2001193657A | 2001-07-17 | |||
| JPH10104418A | 1998-04-24 |