Title:
AGENT, METHOD, AND APPARATUS FOR CLEANING PROBE
Document Type and Number:
Japanese Patent JP3490984
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To beautifully remove foreign matters in a short time while decreasing the wear of needle tips.
SOLUTION: A probe is cleaned by immersing at least its needle tip in a solution comprising 75-95 wt.% water, 4.5-20 wt.% sodium hydroxide, and 0.5-5 wt.% zinc chloride.
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Inventors:
Masahiko Sho
Hiroaki Makino
Hiroaki Makino
Application Number:
JP2001169960A
Publication Date:
January 26, 2004
Filing Date:
June 05, 2001
Export Citation:
Assignee:
Nippon Micronics Co., Ltd.
International Classes:
B08B3/02; B08B3/08; C11D7/06; C11D7/10; C11D17/08; B08B1/00; (IPC1-7): B08B1/00; B08B3/02; B08B3/08; C11D7/06; C11D7/10; C11D17/08
Domestic Patent References:
| JP11230989A | ||||
| JP6279590U |
Attorney, Agent or Firm:
Nobuyuki Matsunaga