PRESSURE CORRECTOR FOR VACUUM GAGE

Japanese Patent JP3490982

B2

PROBLEM TO BE SOLVED: To provide a vacuum gage pressure corrector which is usable together with an existing ionization vacuum gage controller to have a pressure correcting function.
SOLUTION: The vacuum gage pressure corrector is connected to a vacuum gage having a self-correcting function with an ionization vacuum gage having a grid and a correction electrode for detecting external charged particles and usable together with an ionization vacuum gage controller for calculating the pressure value free from influences of external charged particles. A pressure conversion value of a charged particle current flowing in the correction electrode is obtained from a ROM 33, based on pressure information from the ionization vacuum gage controller 150, a DC amplifier 35 converts the output from the ROM 33 into a current value IP, a differential amplifier 36 obtains the deviation of the converted current value IP from a current value ICE detected by the correction electrode, a pressure difference calculating arithmetic circuit 38 calculates a collector flow-in current value calculated, based on an electrode shape factor α to convert it into a pressure difference ΔP, a differential amplifier 31 corrects the pressure value of the controller 150, using the result, and a corrected pressure display 39 indicates the corrected pressure value PCO.

Junko Saeki
Masao Akino

JP2001148066A

January 26, 2004

May 17, 2001

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Junko Saeki
Akino Koki Co., Ltd.

G01L21/32; H01J41/04; H05H13/04; (IPC1-7): G01L21/32; H01J41/04; H05H13/04

JP1038739A
JP63151834A

Hiroshi Inoue

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