Title:
半導体製造ラインの空気分析装置および空気分析方法
Document Type and Number:
Japanese Patent JP4095828
Kind Code:
B2
Abstract:
An air-sampling carrier for sampling air from a clean room of a semiconductor processing facility, an apparatus and a method for analyzing the air, wherein the air-sampling carrier includes a container having an inner space, a door mounted at a front wall of the container, a discharging pipe for discharging the air sample out of the container, and at least one inlet tube for introducing purge gas into the inner space of the container from outside the container. The discharging pipe and inlet tube are respectively formed on an outer surface of the container and connected to an inner space of the container. The air in the unit process tools is effectively sampled using an unmanned carrying apparatus and the pollution level of the air sample is simply and easily measured.
Inventors:
Gold trench
Ham Dongtin
Ham Dongtin
Application Number:
JP2002137343A
Publication Date:
June 04, 2008
Filing Date:
May 13, 2002
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO.,LTD.
International Classes:
B65G49/00; H01L21/02; B65G49/07; G01N1/22; G01N7/00; H01L21/673; H01L21/677
Domestic Patent References:
| JP2000340641A | ||||
| JP9017851A | ||||
| JP7094577A | ||||
| JP7066274A |
Foreign References:
| US5406265 | ||||
| US5074137 |
Attorney, Agent or Firm:
Masaki Hattori