Title:
ALIGNER AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2006135087
Kind Code:
A
Abstract:
To change a space definition member for defining space with a mask surface as a boundary according to a mask to be used.
An aligner EX comprises mask stage MST for moving the mask M along with the space definition member 1 for defining the space with the mask surface as the boundary; a pressure controller for controlling pressure in the space; and an operation mechanism ML for combining the space definition member conforming to the mask M to be used for exposure treatment in a plurality of space definition members 1 with the mask M.
Inventors:
TAKAHASHI AKIHIRO
Application Number:
JP2004322575A
Publication Date:
May 25, 2006
Filing Date:
November 05, 2004
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G03F1/00; G03F1/50; G03F7/20; H01L21/677
Domestic Patent References:
| JPH0882919A | 1996-03-26 | |||
| JPH02176752A | 1990-07-09 | |||
| JPH0729791A | 1995-01-31 | |||
| JP2004061577A | 2004-02-26 | |||
| JPH02142112A | 1990-05-31 | |||
| JPH02108329A | 1990-04-20 | |||
| JP2002372777A | 2002-12-26 | |||
| JP2002033258A | 2002-01-31 | |||
| JP2002158153A | 2002-05-31 | |||
| JPH0318011A | 1991-01-25 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
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