To eliminate the influence of the deformation of the main body structure of an aligner on the exposure accuracy.

An exposure device is provided with stages 2 and 5, which move while the stages 2 and 5 hold an original plate R or a substrate W to which the pattern of the plate R is transferred, a control means 14 which performs exposure treatment with respect to the original plate R or substrate W held on the stages 2 and 5, and active vibration-absorbing devices 9-11 which support a main body structure provided with the stages 2 and 5. The control means 14 performs exposure treatment by taking the drive forces 13a and 13b of the actuators of the vibration-absorbing devices 9-11 into consideration.