Title:
ALIGNER
Document Type and Number:
Japanese Patent JP2001210579
Kind Code:
A
Abstract:
To provide an aligner which reduces the effect of the vibration of a driving system and reduces instrumental errors of a stage position.
An apparatus separately and independently comprises a first level block 1 mounting an exposure means, a bearing 9 which supports a slide shaft 8 for moving a stage base plate 5 which mounts samples to be exposed, and arranging an interferometer 13 of a laser length-measuring machine 6, which measures the location of the stage base plate 5 on the first level block 1.
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Inventors:
HIGUCHI AKIRA
KURIYAMA YOICHI
KURIYAMA YOICHI
Application Number:
JP2000017944A
Publication Date:
August 03, 2001
Filing Date:
January 24, 2000
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
H01L21/027; F16C32/06; G01B11/00; G03F7/20; (IPC1-7): H01L21/027; F16C32/06; G01B11/00; G03F7/20