To provide an alignment apparatus which is capable of easily resetting alignment parameters to the optimal ones in a short period of time when an alignment error occurs.
The alignment apparatus AL is equipped with an alignment mark PA, an imaging device 13 imaging MA, a setting device 15 which sets parameters for carrying out image processing of the image data of the alignment mark PA and the MA, which are imaged by the imaging device 13, an image processing device 14 which carries out image processing of the image data of the alignment mark PA and the MA on the basis of the parameters set by the setting device 15, and a display device 17 which displays the parameters set by the setting device 15 and the processed result outputted from the image processing device 14.
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Next Patent: OPTICAL AMPLIFIER