To improve the reflow property and film appearance of a tin or tin alloy film.
The aliphatic sulfonic acid plating bath for tin and tin alloy contains (a) a soluble salt composed of a stannous salt and any of the salts of the metals selected from copper, bismuth, silver, indium, zinc, nickel, etc., and (b) aliphatic sulfonic acid composed of alkane sulfonic acid and alkanol sulfonic acid, in which the aliphatic sulfonic acid (b) precludes sulfur compounds as impurities exclusive of the sulfonic acid (a compound having a sulfur atom on the way of oxidation within the molecule and a compound having a sulfur atom and chlorine atom in combination within the molecule) or reduces such compounds down to a slight concentration. Examples of impurities that affect plating characteristics include dimethyl disulfide, methane thiosulfonic acid S-methyl and α-chlorodimethyl sulfone.
OBINATA MASAYOSHI
OBATA KEIGO
YOSHIMOTO MASAKAZU
TSUJI SEIKI
UCHIDA MAMORU
ORI KEIJI
SAKAEGAWA MASAHIRO
DAIWA FINE CHEMICALS CO LTD LA
MITSUBISHI MATERIALS CORP