Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ALKALINE SOLUBLE POLYMER, PHOTOSENSITIVE RESIN COMPOSITION CONTAINING THE SAME, AND APPLICATION OF THE SAME
Document Type and Number:
Japanese Patent JP2011132533
Kind Code:
A
Abstract:

To provide an alkaline soluble polymer having a low hardening shrinkage and excellent in physical properties of the hardened film, a photosensitive resin composition excellent in pattern shape, chemical resistance, physical properties and storing stability of cured products even in curing at a low-temperature region, a manufacturing method of cured relief pattern using the composition, and to provide a semiconductor device comprising the cured relief pattern.

There are provided the alkali soluble polymer having a specific structure, and a photosensitive resin composition containing the same.


Inventors:
KANEDA TAKAYUKI
SHIBUI TOMOHITO
Application Number:
JP2011037827A
Publication Date:
July 07, 2011
Filing Date:
February 24, 2011
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ASAHI KASEI E MATERIALS CORP
International Classes:
C08G69/02; G03F7/004; G03F7/023; G03F7/038; G03F7/075; H01L21/027
Domestic Patent References:
JP2009127045A2009-06-11
JP2007119503A2007-05-17
JP2011034097A2011-02-17
JP2009127045A2009-06-11
JP2007119503A2007-05-17
JP2011034097A2011-02-17
Foreign References:
WO2010001780A12010-01-07
WO2008111470A12008-09-18
WO2009151012A12009-12-17
WO2005121895A12005-12-22
WO2009145158A12009-12-03
WO2010001780A12010-01-07
WO2008111470A12008-09-18
WO2009151012A12009-12-17
WO2005121895A12005-12-22
WO2009145158A12009-12-03