Title:
ALKALINE SOLUBLE POLYMER, PHOTOSENSITIVE RESIN COMPOSITION CONTAINING THE SAME, AND APPLICATION OF THE SAME
Document Type and Number:
Japanese Patent JP2011132533
Kind Code:
A
Abstract:
To provide an alkaline soluble polymer having a low hardening shrinkage and excellent in physical properties of the hardened film, a photosensitive resin composition excellent in pattern shape, chemical resistance, physical properties and storing stability of cured products even in curing at a low-temperature region, a manufacturing method of cured relief pattern using the composition, and to provide a semiconductor device comprising the cured relief pattern.
There are provided the alkali soluble polymer having a specific structure, and a photosensitive resin composition containing the same.
Inventors:
KANEDA TAKAYUKI
SHIBUI TOMOHITO
SHIBUI TOMOHITO
Application Number:
JP2011037827A
Publication Date:
July 07, 2011
Filing Date:
February 24, 2011
Export Citation:
Assignee:
ASAHI KASEI E MATERIALS CORP
International Classes:
C08G69/02; G03F7/004; G03F7/023; G03F7/038; G03F7/075; H01L21/027
Domestic Patent References:
JP2009127045A | 2009-06-11 | |||
JP2007119503A | 2007-05-17 | |||
JP2011034097A | 2011-02-17 | |||
JP2009127045A | 2009-06-11 | |||
JP2007119503A | 2007-05-17 | |||
JP2011034097A | 2011-02-17 |
Foreign References:
WO2010001780A1 | 2010-01-07 | |||
WO2008111470A1 | 2008-09-18 | |||
WO2009151012A1 | 2009-12-17 | |||
WO2005121895A1 | 2005-12-22 | |||
WO2009145158A1 | 2009-12-03 | |||
WO2010001780A1 | 2010-01-07 | |||
WO2008111470A1 | 2008-09-18 | |||
WO2009151012A1 | 2009-12-17 | |||
WO2005121895A1 | 2005-12-22 | |||
WO2009145158A1 | 2009-12-03 |
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