Title:
ALUMINUM SHEET, ITS PRODUCTION AND DEPOSITION PREVENTIVE COVER USING THE SHEET
Document Type and Number:
Japanese Patent JP3148878
Kind Code:
B2
Abstract:
PURPOSE: To obtain an aluminum sheet suitable to the deposition preventive cover of a plasma treating device, etc., by forming an oxide coating film consisting of a sealed hydrate on the surface of a base material consisting of aluminum and specifying the thickness of the oxide film and the content of the metallic impurities other than the base material.
CONSTITUTION: The surface of a sheet consisting of aluminum or aluminum alloy is cleaned, and the sheet is dipped in a soln. contg. about 150-320g/l of sulfuric acid and 2-25g/l of aluminum, anodized and cleaned to form an oxide coating film having about 10-150μm thickness. The sheet is then dipped in pure water and sealed at ≤85°C for ≥10hr to control the content of metallic impurities other than the base material to ≤1ppb. An aluminum sheet having a chemically stable oxide coating film without any open cell, excellent in corrosion resistance and with the diffusion of metal, etc., to the environment prevented is obtained in this way, and the sheet is appropriately used for the deposition preventive cover of a plasma treating device, etc.
Inventors:
Kenji Sudo
Sakae Abe
Sakae Abe
Application Number:
JP32362493A
Publication Date:
March 26, 2001
Filing Date:
December 22, 1993
Export Citation:
Assignee:
SUMITOMO METAL INDUSTRIES,LTD.
Nippon Denki Kagaku Kogyo Co., Ltd.
Nippon Denki Kagaku Kogyo Co., Ltd.
International Classes:
C23C16/50; C23C16/511; C23F4/00; C25D11/18; (IPC1-7): C25D11/18; C23F4/00
Domestic Patent References:
| JP734291A |
Attorney, Agent or Firm:
Ryuji Inouchi
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