To provide an analysis method of mapping data which is independent of a measurement apparatus, enabling an analyzing person to arbitrarily designate a region, while viewing a map chart and analyzing data in a particular part.

When the mapping data of each section and signal intensity obtained, by scanning the predetermined region on a surface of an analysis sample divided into a plurality of the section in a matrix is analyzed; the map chart comprising values of each section and the signal intensity is made to correspond to the matrix of a spread sheet application of a computer and displayed on a display; and the particular region comprising the predetermined section in the map chart is designated while the map chart is observed, and by a calculation function of the spread sheet application, calculation is performed for each section constituting a particular region.