Title:
ANGULAR SPEED SENSOR
Document Type and Number:
Japanese Patent JP2000205860
Kind Code:
A
Abstract:
To realize smaller size, improved performance, and lower cost, etc.
A vibrator 20 is provided which comprises a vibration part 30 provided with a drive vibration surface 26 formed into flat-surface with a flat piezoelectric body 24 and a driving/detecting electrode 25, and a unit-axis permanent elastic metal cylinder 21 whose one end side fixed to the vibration part 30 while vertical to the drive vibration surface 26. Thus, formation of the flat piezoelectric body 24 and electrode 25 is easy, and such features as small size, high performance, and low cost are provided including adjustment- free, small size, high sensitivity which are features of uni axial permanent elastic metal cylinder 21.
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Inventors:
TAKAHASHI JUHEI
Application Number:
JP456099A
Publication Date:
July 28, 2000
Filing Date:
January 11, 1999
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01C19/56; (IPC1-7): G01C19/56; G01P9/04
Attorney, Agent or Firm:
Masahiro Kurai