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Title:
Angular velocity sensor
Document Type and Number:
Japanese Patent JP6125914
Kind Code:
B2
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Inventors:
Chung Nozomi
Masahide Hayashi
Seiko Yamanaka
Application Number:
JP2013120738A
Publication Date:
May 10, 2017
Filing Date:
June 07, 2013
Export Citation:
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Assignee:
Hitachi Automotive Systems, Ltd.
International Classes:
G01C19/5747; B81B3/00; G01C19/5762; H01L29/84
Domestic Patent References:
JP2011504585A
JP2012242240A
JP2012242286A
JP2002213962A
JP2008046058A
JP2012522228A
JP2008058259A
Foreign References:
WO2010021242A1
Attorney, Agent or Firm:
Yamato Tsutsui



 
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