APPARATUS FOR CARRYING IN AND CARRYING OUT OF VESSEL, AND METHOD OF CARRYING IN AND CARRYING OUT

Title:

APPARATUS FOR CARRYING IN AND CARRYING OUT OF VESSEL, AND METHOD OF CARRYING IN AND CARRYING OUT

Document Type and Number:

Japanese Patent JP2001053130

Kind Code:

A

Abstract:

To provide an apparatus for vessel-carrying in and out and a method enabling carrying in/out of vessels, housing and taking out substrates in/from the vessels successively.

An apparatus 2 for carrying in and out is provided with a before-cleaning side out-port 12, a before-cleaning side in-port 13, an after- cleaning side in-port 15, an after-cleaning side out-port 16, a loader/unloader part 20, a carriage arm 10 for carrying carriers C between stock parts 14, 17, 31, 32, 33 and 34. The carriage arm 10 carries the carriers C from the in-port 13 to the loader/unloader part 20 and from the loader/unloader part 20 to the out-port 12 via the stock parts 14, 31 and 32, and carries the carries C from the in-port 15 to the loader/unloader part 20 and from the loader/unloader part 20 to the out-port 16 via the stock parts 17, 33 and 34.

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Inventors:

MORI HIROYUKI
YAMAGUCHI TOKUHIRO
SOMEZAKI MASAHIRO

Application Number:

JP22997599A

Publication Date:

February 23, 2001

Filing Date:

August 16, 1999

Export Citation:

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Assignee:

TOKYO ELECTRON LTD

International Classes:

B08B3/04; H01L21/304; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B08B3/04; H01L21/304

Attorney, Agent or Firm:

Koji Hagiwara (2 outside)

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