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Patent Searching and Data


Title:
TRANSFERRING/MEASURING APPARATUS OF CHIP OF SEMICONDUCTOR INTEGRATED CIRCUIT
Document Type and Number:
Japanese Patent JPH06194413
Kind Code:
A
Abstract:

PURPOSE: To provide a transferring/measuring apparatus of semiconductor integrated circuit chips wherein the chips are never stopped in the middle of the transfer and which simplifies a relay circuit necessary for the measurement of the chips.

CONSTITUTION: When chips are placed at a higher position of an inclined transfer rail member 1 constituting a transferring part, the chips slide towards a lower position. At this time, an air is blown to the chips through blow holes 3 from the side of the bottom face or upper face of the chips. Connecting pins 8 of the transferred chips are connected to arrays 7b of connecting terminals of a relay circuit 7 provided in correspondence to the kind of chips. A terminal aligning member 6 of a measuring system 5 is connected to the other arrays 7a of connecting terminals of the relay circuit 7.


Inventors:
SHIMOMURA SHIGEHISA
Application Number:
JP33561191A
Publication Date:
July 15, 1994
Filing Date:
November 25, 1991
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/66; H01L21/677; H01L21/68; G01R31/26; (IPC1-7): G01R31/26; H01L21/66; H01L21/68
Attorney, Agent or Firm:
Fukumori Hisao