To provide an apparatus for forming a deposition film which reduces an image defect and simultaneously enhances the uniformity of potential characteristics in an electrophotographic photoconductor, and enhances the stability of them as well.
The apparatus for forming a deposition film has: a reaction vessel 201 which is composed by being sandwiched between a first cylindrical side wall 101 and a second cylindrical side wall 102 surrounding it; a substrate-holding member which is placed in the reaction vessel 201 and holds a substrate 205; a source-gas supply means 210; and a power supply system for supplying a high-frequency power into the reaction vessel. At least one part of the first cylindrical side wall 101 is made from a dielectric substance. On the central axis of the first cylindrical side wall, a first high-frequency electrode 202 is arranged in a state of being separated from the first cylindrical side wall.
UEDA SHIGENORI
TAZAWA DAISUKE
KAWAMURA KUNIMASA
TANIGUCHI TAKAHISA
Ishibashi Masayuki
Shinichi Iwata
Masaaki Ogata