To provide an apparatus for inspecting a dynamic flatness of a mirror, capable of checking flatness values of the mirror when being irradiated with a laser beam and being deformed maximally.
The apparatus includes: a laser oscillator 8 which outputs pulsing laser beam 9; a beam splitter 12 which is arranged on the optical axis of the laser beam 9 at an angle of 45 degrees, transmits 50% portions of the incident laser beam 9 and reflects the remaining 50% portions; a reference mirror 13 which is arranged perpendicularly on the optical axis of the laser beam 9 transmitted by the beam splitter 12, and reflects the incident laser beam 9; an image processing device 17 which is arranged on the optical axis of laser beam 9tr being reflected by the beam splitter 12 after reflected by the reference mirror 13, is connected with a light receiving device 16 for receiving laser beam 9rt being transmitted by the beam splitter 12 after reflected by a mirror 1, and digitizes a surface shape of the mirror 1 from an interference fringe caused by the received laser beam 9tr and laser beam 9rt; and a controller 4 which operates the laser oscillator 8 and the light receiving device 16, based on the current position information of the mirror 1.
OMAE GOICHI
SUGAWARA HIROYUKI
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