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Title:
APPARATUS AND METHOD FOR DATA ANALYSIS
Document Type and Number:
Japanese Patent JP2010232680
Kind Code:
A
Abstract:

To provide an apparatus for analyzing data in which composite data can be merged with other data.

A method and apparatus for testing semiconductors according to various aspects includes a test system with a composite data analysis element that is configured to analyze data from more than one data set. The test system can be configured to provide data in an output report. The composite data analysis element properly performs a spatial analysis to identify patterns and irregularities in the composite data set. Furthermore, the composite data analysis element can operate associated with such various other analysis systems as a cluster detection system, an exclusion system, etc. in order to refine the composite data analysis.


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Inventors:
TABOR ERIC PAUL
Application Number:
JP2010143069A
Publication Date:
October 14, 2010
Filing Date:
June 23, 2010
Export Citation:
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Assignee:
TEST ADVANTAGE INC
International Classes:
H01L21/66; G01R31/01; G01R31/28; G05B23/02; H01L21/02
Domestic Patent References:
JPH10326816A1998-12-08
Foreign References:
WO2002095802A22002-11-28
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita



 
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