APPARATUS AND METHOD FOR EVALUATING SEMICONDUCTOR DEVICE, AND COMPUTER-READABLE RECORD MEDIUM WITH SEMICONDUCTOR DEVICE EVALUATION PROGRAM RECORDED

Japanese Patent JP3692005

B2

PROBLEM TO BE SOLVED: To improve convergence and calculation speed when introducing quantum effect to a device simulator that is a semiconductor device-evaluating apparatus.
SOLUTION: In this semiconductor device-valuation apparatus, expressions are solved, where the expressions include the Poisson equation, current continuation expression of electron concentration and hole concentration, and a current density expression that is the auxiliary expression of the current continuation expression, and self-non-contradictory potential and electron concentration and hole concentration are obtained. In this case, for adding the quantum effect to the semiconductor device valuation device, a means is provided, where the means uses quantum correction potential that is function of electron concentration for solving the current density expression, and the electron concentration is, furthermore, set to a function for satisfying the Schroedinger's equation.

Kazuya Matsuzawa

JP2000075170A

September 07, 2005

March 17, 2000

Click for automatic bibliography generation  

Toshiba Corporation

G06F17/50; H01L21/336; H01L21/66; H01L29/00; G01R31/26; H01L29/78; (IPC1-7): H01L29/00; H01L21/336; H01L29/78

JP2001185713A
JP2000277722A
JP11003998A

IEEE TRANSACTIONS ON ELECTRIN DEVICES,1996年 1月,Vol.43, No.1,pp.90-96
IEICE TRANSACTIONS ON ELECTRONICS,1997年 6月,Vol.E80-C, No.6,pp.806-811
Nanotechnology,1999年,Vol.10,pp.192-197

Hiroshi Horiguchi

Previous Patent: FLUID PRESSURE CIRCUIT DEVICE

Next Patent: METHOD FOR MANUFACTURING READILY WATER-SOLUBLE SODIUM CARBOXYMETHYL CELLULOSE