Title:
APPARATUS AND METHOD OF FORMING THIN FILM
Document Type and Number:
Japanese Patent JP2002200448
Kind Code:
A
Abstract:
To form the color code of patterns efficiently in the formation of a thin film on a base material.
Film forming atomized solutions each having a different color are formed individually by applying ultrasonic vibration transducers 5a-51 respectively to material solutions R, B, and G each having a different color by duty driving in a control part 17 to atomize and are mixed by stirring and deposited on the upper surface of a base material 1. The thin film having a mixed color is formed easily without preparing material solutions of all colors. The cleaning and exchange of a liquid vessel in every color changing is dispensed with even if the changing of the color of the thin film is required every pattern.
Inventors:
MATSUI AKINORI
Application Number:
JP2000402259A
Publication Date:
July 16, 2002
Filing Date:
December 28, 2000
Export Citation:
Assignee:
AUTO NETWORK GIJUTSU KENKYUSHO
SUMITOMO WIRING SYSTEMS
SUMITOMO ELECTRIC INDUSTRIES
SUMITOMO WIRING SYSTEMS
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
H05B33/10; B05B17/06; B05D1/02; B05D1/32; B05D3/00; H01L51/50; H05B33/14; (IPC1-7): B05B17/06; B05D1/02; B05D1/32; B05D3/00; H05B33/10; H05B33/14
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)