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Patent Searching and Data


Title:
NON-CONTACT MOVABLE TABLE COATER
Document Type and Number:
Japanese Patent JP2002200450
Kind Code:
A
Abstract:

To provide a table coater capable of coating smoothly without being affected by the deformation of a rail even if it occurs.

In the table coater T constituted of a table placing a substrate W, a die body 4 horizontally movable relatively to the table and vertically movable, a non-contact type distance measuring sensor 8 for measuring the distance between the surface of the table or the surface of the substrate and a lip tip part of the die body and provided in the die body and a controller for controlling the distance of vertical movement based on the measured value in the distance measuring sensor, a supporting means of the die body is constituted of a pair of the rails 3 provided with a certain interval on the table and a slider 13 having a gas jetting hole on the surface facing the surface of the rail with a prescribed interval and a linear motor is used as the driving means.


Inventors:
NAKAMURA MASAHIRO
Application Number:
JP2000401921A
Publication Date:
July 16, 2002
Filing Date:
December 28, 2000
Export Citation:
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Assignee:
CHUGAI RO KOGYO KAISHA LTD
International Classes:
B05C5/02; B05C11/00; (IPC1-7): B05C5/02; B05C11/00
Attorney, Agent or Firm:
Kaoru Aoyama (4 people outside)