To provide an activating heat treatment apparatus and a heat treatment method which can perform uniform heat treatment by irradiating a treatment target with light of a required intensity distribution without generating deformation or distortion in a mask member.
The activating heat treatment apparatus is provided with a holding stand for holding the treatment target, a lamp unit for performing the heat treatment of the treatment target by irradiating the treatment target with light and a mask member arranged between the lamp unit and the treatment target, having a scattering area for controlling the intensity distribution of light with which the treatment target is irradiated on a surface opposite to the treatment target or in the vicinity of the treatment target and composed of a transparent material.
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
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